Ion Implantation and Synthesis of Materials

Resource Information

The work Ion Implantation and Synthesis of Materials represents a distinct intellectual or artistic creation found in University of Oklahoma Libraries. This resource is a combination of several types including: Work, Language Material, Books.

Label

Ion Implantation and Synthesis of Materials

Statement of responsibility

by Michael Nastasi, James W. Mayer

Creator

• Nastasi, Michael

Contributor

• Mayer, James W.

Author

• Nastasi, Michael
• Mayer, James W.

Author

• Nastasi, Michael
• Mayer, James W.

Subject

• Chemistry, Physical organic
• Physical Chemistry
• Optical materials
• Optical and Electronic Materials
• Particle Acceleration and Detection, Beam Physics
• Surfaces (Physics)
• Characterization and Evaluation of Materials
• Condensed Matter Physics
• Particle acceleration

Language

• eng
• eng

Summary

Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described

Member of

• Springer Series in Materials Science, v.80

Dewey number

620.1/1

http://bibfra.me/vocab/relation/httpidlocgovvocabularyrelatorsaut

• LcDlBnJkYZc
• XIri8TgjMLM

Language note

English

LC call number

QC770-798

Literary form

non fiction

Nature of contents

dictionaries

Series statement

Springer Series in Materials Science, v.80