Coverart for item
The Resource Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas, John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas, John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Label
Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas
Title
Optical characterization techniques for high-performance microelectronic device manufacturing II
Title remainder
25-26 October 1995, Austin, Texas
Statement of responsibility
John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Language
eng
Member of
Cataloging source
MoKL
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.O68 1995
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Lowell, John
  • Chen, Ray T
  • Mathur, Jagdish P
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2638
http://library.link/vocab/subjectName
  • Integrated circuits industry
  • Manufacturing processes
  • Semiconductors
  • Integrated circuits
  • Semiconductors
  • Optical detectors
Label
Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas, John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
ix, 302 p.
Isbn
9780819420046
Lccn
95070381
Other physical details
ill.
System control number
  • 2046957-01okla_normanlaw
  • (SIRSI)2046957
  • (Sirsi) i9780819420046
  • (OCoLC)33255791
Label
Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas, John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
ix, 302 p.
Isbn
9780819420046
Lccn
95070381
Other physical details
ill.
System control number
  • 2046957-01okla_normanlaw
  • (SIRSI)2046957
  • (Sirsi) i9780819420046
  • (OCoLC)33255791

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