Coverart for item
The Resource Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas, Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas, Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Label
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Title
Optical characterization techniques for high-performance microelectronic device manufacturing
Title remainder
20 October 1994, Austin, Texas
Statement of responsibility
Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Language
eng
Member of
Cataloging source
OWpIT
Dewey number
621.3815/2/0287
Illustrations
illustrations
Index
index present
LC call number
TK7871.85
LC item number
.O595 1994
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Mathur, Jagdish P
  • Lowell, John
  • Chen, Ray T
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2337
http://library.link/vocab/subjectName
  • Semiconductors
  • Integrated circuits
  • Semiconductors
  • Integrated circuits
  • Optical pattern recognition
Label
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas, Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Extent
vii, 202 p.
Isbn
9780819416704
Lccn
94067263
Other physical details
ill.
System control number
  • 2046958-01okla_normanlaw
  • (SIRSI)2046958
  • (Sirsi) i9780819416704
  • (OCoLC)31210042
Label
Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas, Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Extent
vii, 202 p.
Isbn
9780819416704
Lccn
94067263
Other physical details
ill.
System control number
  • 2046958-01okla_normanlaw
  • (SIRSI)2046958
  • (Sirsi) i9780819416704
  • (OCoLC)31210042

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