Coverart for item
The Resource Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
Title
Optical characterization techniques for high-performance microelectronic device manufacturing III
Title remainder
16-17 October 1996, Austin, Texas
Statement of responsibility
Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.O69 1999
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • DeBusk, Damon
  • Chen, Ray T
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
Series statement
SPIE proceedings series
Series volume
v. 2877
http://library.link/vocab/subjectName
  • Integrated circuits industry
  • Manufacturing processes
  • Semiconductors
  • Integrated circuits
  • Semiconductors
  • Optical detectors
Label
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
ix, 218 p.
Isbn
9780819422750
Lccn
96069472
Other physical details
ill.
System control number
  • 2046959-01okla_normanlaw
  • (SIRSI)2046959
  • (Sirsi) i9780819422750
  • (OCoLC)35664504
Label
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
ix, 218 p.
Isbn
9780819422750
Lccn
96069472
Other physical details
ill.
System control number
  • 2046959-01okla_normanlaw
  • (SIRSI)2046959
  • (Sirsi) i9780819422750
  • (OCoLC)35664504

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