Coverart for item
The Resource Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)

Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)

Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA
Title
Micromachining technology for micro-optics and nano-optics III
Title remainder
25-27 January 2005, San Jose, California, USA
Statement of responsibility
Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
Related
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1969-
http://library.link/vocab/relatedWorkOrContributorName
  • Johnson, Eric G.
  • Nordin, Gregory P
  • Suleski, Thomas J.
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
  • Solid State Technology (Organization)
  • Sandia National Laboratories
Series statement
Proceedings of SPIE,
Series volume
v. 5720
http://library.link/vocab/subjectName
  • Victoria and Albert Museum
  • Integrated optics
  • Miniature electronic equipment
  • Optoelectronic devices
  • Micromachining
  • Microelectromechanical systems
Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Instantiates
Publication
Note
First conference has title: Micromachining technology for micro-optics
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
xl, 282 p.
Isbn
9780819456946
Other physical details
ill.
System control number
  • 2448747-01okla_normanlaw
  • (SIRSI)2448747
  • (Sirsi) o59144033
  • (OCoLC)59144033
Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Publication
Note
First conference has title: Micromachining technology for micro-optics
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
xl, 282 p.
Isbn
9780819456946
Other physical details
ill.
System control number
  • 2448747-01okla_normanlaw
  • (SIRSI)2448747
  • (Sirsi) o59144033
  • (OCoLC)59144033

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