Coverart for item
The Resource Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]

Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]

Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia
Title
Micro- and nano-electronics 2003
Title remainder
6-10 October 2003, Zvenigorod, Russia
Statement of responsibility
Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2003
http://bibfra.me/vocab/lite/meetingName
ICMNE-2003
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Valiev, K. A.
  • Orlikovskiĭ, A. A.
  • Society of Photo-optical Instrumentation Engineers
  • Society of Photo-optical Instrumentation Engineers
  • Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk)
  • Russia (Federation)
Series statement
SPIE proceedings series,
Series volume
v. 5401
http://library.link/vocab/subjectName
  • Microelectronics
  • Nanotechnology
  • Lithography
  • Photonics
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]
Instantiates
Publication
Note
  • "Selected papers ... ICMNE-2003"--P. xvii
  • "SPIE is an international technical society dedicated to advancing engineering and scientific applications of optical, photonic, imaging, electronic, and optoelectronic technologies."
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
xvii, 762 p.
Isbn
9780819453242
Other physical details
ill.
System control number
  • 2267384-01okla_normanlaw
  • (SIRSI)2267384
  • (Sirsi) o55859941
  • (OCoLC)55859941
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]
Publication
Note
  • "Selected papers ... ICMNE-2003"--P. xvii
  • "SPIE is an international technical society dedicated to advancing engineering and scientific applications of optical, photonic, imaging, electronic, and optoelectronic technologies."
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Extent
xvii, 762 p.
Isbn
9780819453242
Other physical details
ill.
System control number
  • 2267384-01okla_normanlaw
  • (SIRSI)2267384
  • (Sirsi) o55859941
  • (OCoLC)55859941

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