The Resource Low-energy ion irradiation of solid surfaces, Hubert Gnaser, (electronic resource)

Low-energy ion irradiation of solid surfaces, Hubert Gnaser, (electronic resource)

Label
Low-energy ion irradiation of solid surfaces
Title
Low-energy ion irradiation of solid surfaces
Statement of responsibility
Hubert Gnaser
Creator
Subject
Genre
Language
eng
Summary
The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches
Member of
Cataloging source
BUF
http://library.link/vocab/creatorDate
1953-
http://library.link/vocab/creatorName
Gnaser, Hubert
Dewey number
  • 539 s
  • 530.4/16
Illustrations
illustrations
Index
index present
LC call number
QC1
LC item number
.S797 vol. 146
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Springer tracts in modern physics,
Series volume
v. 146
http://library.link/vocab/subjectName
  • Solids
  • Ion bombardment
  • Ion bombardment
  • Solids
Label
Low-energy ion irradiation of solid surfaces, Hubert Gnaser, (electronic resource)
Link
http://dx.doi.org/10.1007/BFb0110693
Instantiates
Publication
Bibliography note
Includes bibliographical references (p. [259]-289) and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Introduction -- Interaction of low-energy ions with solids -- Sputtering of multicomponent materials -- Ionization processes at surfaces -- Ion bombardment of crystalline semiconductors -- Summary
Dimensions
unknown
Extent
1 online resource (viii, 293 pages)
Form of item
online
Isbn
9783540497738
Isbn Type
(electronic bk.)
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations : digital, HTML and PDF files.
Specific material designation
remote
System control number
  • (OCoLC)216935027
  • (OCoLC)ocn216935027
Label
Low-energy ion irradiation of solid surfaces, Hubert Gnaser, (electronic resource)
Link
http://dx.doi.org/10.1007/BFb0110693
Publication
Bibliography note
Includes bibliographical references (p. [259]-289) and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Introduction -- Interaction of low-energy ions with solids -- Sputtering of multicomponent materials -- Ionization processes at surfaces -- Ion bombardment of crystalline semiconductors -- Summary
Dimensions
unknown
Extent
1 online resource (viii, 293 pages)
Form of item
online
Isbn
9783540497738
Isbn Type
(electronic bk.)
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations : digital, HTML and PDF files.
Specific material designation
remote
System control number
  • (OCoLC)216935027
  • (OCoLC)ocn216935027

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