The Resource Helium ion microscopy : principles and applications, David C. Joy

Helium ion microscopy : principles and applications, David C. Joy

Label
Helium ion microscopy : principles and applications
Title
Helium ion microscopy
Title remainder
principles and applications
Statement of responsibility
David C. Joy
Creator
Author
Subject
Genre
Language
eng
Summary
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions such as the Helium Ion Microscope (HIM) are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined. Presents a detailed physical model of ion-solid interactions and signal generation Provides a detailed database of iSE yield behavior as a function of the target ion, element, and energy
Member of
Cataloging source
GW5XE
http://library.link/vocab/creatorDate
1943-
http://library.link/vocab/creatorName
Joy, David C.
Dewey number
578.1
Illustrations
illustrations
Index
index present
LC call number
QH212.F5
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
SpringerBriefs in Materials,
http://library.link/vocab/subjectName
  • Field ion microscopy
  • Helium ions
  • Ion bombardment
  • Materials Science
  • Characterization and Evaluation of Materials
  • Spectroscopy and Microscopy
  • Spectroscopy/Spectrometry
  • Nanotechnology
  • NATURE / Animals / Wildlife
  • SCIENCE / Microscopes & Microscopy
  • Field ion microscopy
  • Helium ions
  • Ion bombardment
  • Chimie
  • Science des matériaux
Label
Helium ion microscopy : principles and applications, David C. Joy
Link
http://dx.doi.org/10.1007/978-1-4614-8660-2
Instantiates
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Patterning and Nanofabrication
  • Introduction to Helium Ion Microscopy
  • Microscopy with Ions: A Brief History
  • Operating the Helium Ion Microscope
  • Ion-Solid Interactions and Image Formation
  • Charging and Damage
  • Microanalysis with HIM
  • Ion-Generated Damage
  • Working with Other Ion beams
Dimensions
unknown
Extent
1 online resource (viii, 64 pages)
File format
unknown
Form of item
online
Isbn
9781461486602
Isbn Type
(electronic bk.)
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
10.1007/978-1-4614-8660-2
Other physical details
illustrations.
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
  • (OCoLC)859396044
  • (OCoLC)ocn859396044
Label
Helium ion microscopy : principles and applications, David C. Joy
Link
http://dx.doi.org/10.1007/978-1-4614-8660-2
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Patterning and Nanofabrication
  • Introduction to Helium Ion Microscopy
  • Microscopy with Ions: A Brief History
  • Operating the Helium Ion Microscope
  • Ion-Solid Interactions and Image Formation
  • Charging and Damage
  • Microanalysis with HIM
  • Ion-Generated Damage
  • Working with Other Ion beams
Dimensions
unknown
Extent
1 online resource (viii, 64 pages)
File format
unknown
Form of item
online
Isbn
9781461486602
Isbn Type
(electronic bk.)
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
10.1007/978-1-4614-8660-2
Other physical details
illustrations.
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
  • (OCoLC)859396044
  • (OCoLC)ocn859396044

Library Locations

  • Architecture LibraryBorrow it
    Gould Hall 830 Van Vleet Oval Rm. 105, Norman, OK, 73019, US
    35.205706 -97.445050
  • Bizzell Memorial LibraryBorrow it
    401 W. Brooks St., Norman, OK, 73019, US
    35.207487 -97.447906
  • Boorstin CollectionBorrow it
    401 W. Brooks St., Norman, OK, 73019, US
    35.207487 -97.447906
  • Chinese Literature Translation ArchiveBorrow it
    401 W. Brooks St., RM 414, Norman, OK, 73019, US
    35.207487 -97.447906
  • Engineering LibraryBorrow it
    Felgar Hall 865 Asp Avenue, Rm. 222, Norman, OK, 73019, US
    35.205706 -97.445050
  • Fine Arts LibraryBorrow it
    Catlett Music Center 500 West Boyd Street, Rm. 20, Norman, OK, 73019, US
    35.210371 -97.448244
  • Harry W. Bass Business History CollectionBorrow it
    401 W. Brooks St., Rm. 521NW, Norman, OK, 73019, US
    35.207487 -97.447906
  • History of Science CollectionsBorrow it
    401 W. Brooks St., Rm. 521NW, Norman, OK, 73019, US
    35.207487 -97.447906
  • John and Mary Nichols Rare Books and Special CollectionsBorrow it
    401 W. Brooks St., Rm. 509NW, Norman, OK, 73019, US
    35.207487 -97.447906
  • Library Service CenterBorrow it
    2601 Technology Place, Norman, OK, 73019, US
    35.185561 -97.398361
  • Price College Digital LibraryBorrow it
    Adams Hall 102 307 West Brooks St., Norman, OK, 73019, US
    35.210371 -97.448244
  • Western History CollectionsBorrow it
    Monnet Hall 630 Parrington Oval, Rm. 300, Norman, OK, 73019, US
    35.209584 -97.445414
Processing Feedback ...