The Resource Excimer Laser Technology, edited by Dirk Basting, Gerd Marowsky, (electronic resource)

Excimer Laser Technology, edited by Dirk Basting, Gerd Marowsky, (electronic resource)

Label
Excimer Laser Technology
Title
Excimer Laser Technology
Statement of responsibility
edited by Dirk Basting, Gerd Marowsky
Contributor
Editor
Editor
Subject
Language
  • eng
  • eng
Summary
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology
Member of
Dewey number
621.3663
http://bibfra.me/vocab/relation/httpidlocgovvocabularyrelatorsedt
  • ii9JpAI78pk
  • ZmVPdJtKsXw
Language note
English
LC call number
  • TA1671-1707
  • TA1501-1820
Literary form
non fiction
Nature of contents
dictionaries
http://library.link/vocab/relatedWorkOrContributorName
  • Basting, Dirk.
  • Marowsky, Gerd.
Series statement
Advanced texts in physics
http://library.link/vocab/subjectName
  • Lasers
  • Photonics
  • Physical chemistry
  • Physical measurements
  • Measurement
  • Engineering
  • Optics, Lasers, Photonics, Optical Devices
  • Physical Chemistry
  • Measurement Science and Instrumentation
  • Engineering, general
Label
Excimer Laser Technology, edited by Dirk Basting, Gerd Marowsky, (electronic resource)
Instantiates
Publication
Note
Description based upon print version of record
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Contents
Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical Applications of Excimer Lasers -- High-Intensity Applications of Excimer Lasers -- High-Repetition-Rate Applications of Excimer Lasers -- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm -- Trends in Worldwide Excimer Laser Sales
Dimensions
unknown
Edition
1st ed. 2005.
Extent
1 online resource (451 p.)
Form of item
online
Isbn
9781280620935
Media category
computer
Media type code
  • c
Other control number
10.1007/b137894
Specific material designation
remote
System control number
  • (CKB)1000000000230807
  • (EBL)238634
  • (OCoLC)262680603
  • (SSID)ssj0000769916
  • (PQKBManifestationID)12321259
  • (PQKBTitleCode)TC0000769916
  • (PQKBWorkID)10785605
  • (PQKB)10752802
  • (SSID)ssj0000151771
  • (PQKBManifestationID)11161100
  • (PQKBTitleCode)TC0000151771
  • (PQKBWorkID)10319857
  • (PQKB)11788541
  • (DE-He213)978-3-540-26667-9
  • (MiAaPQ)EBC238634
  • (EXLCZ)991000000000230807
Label
Excimer Laser Technology, edited by Dirk Basting, Gerd Marowsky, (electronic resource)
Publication
Note
Description based upon print version of record
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Contents
Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical Applications of Excimer Lasers -- High-Intensity Applications of Excimer Lasers -- High-Repetition-Rate Applications of Excimer Lasers -- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm -- Trends in Worldwide Excimer Laser Sales
Dimensions
unknown
Edition
1st ed. 2005.
Extent
1 online resource (451 p.)
Form of item
online
Isbn
9781280620935
Media category
computer
Media type code
  • c
Other control number
10.1007/b137894
Specific material designation
remote
System control number
  • (CKB)1000000000230807
  • (EBL)238634
  • (OCoLC)262680603
  • (SSID)ssj0000769916
  • (PQKBManifestationID)12321259
  • (PQKBTitleCode)TC0000769916
  • (PQKBWorkID)10785605
  • (PQKB)10752802
  • (SSID)ssj0000151771
  • (PQKBManifestationID)11161100
  • (PQKBTitleCode)TC0000151771
  • (PQKBWorkID)10319857
  • (PQKB)11788541
  • (DE-He213)978-3-540-26667-9
  • (MiAaPQ)EBC238634
  • (EXLCZ)991000000000230807

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